R&D LAB 4.3 «NANOELECTRONIC MATERIALS AND STRUCTURES»

• Formation and research of porous silicon and nanostructured composite materials and heterostructures on its basis for creation of micro- and nanoelectronic devices, integral optoelectronics, micromechanics and sensory devices
• Development of complementary metal-oxide-semiconductor large-scale integrated circuits on the basis of silicon-on-insulator structures
• Development of miniature engines for nano-satellities

PRODUCTS

• Free films of nanostructured porous copper for the production of flexible electrodes for transdermal therapy by electroporation
• Formation technology of copper and nickel films with weak or strong connections with silicon substrate for the creation of micro- and nanosystem devices 
• Nanostructured films and nanocrystals of zinc oxide for photodetectors and solar elements
• Nanocomposite materials based on ferromagnetic metals precipitation in porous silicon for magnetic memory devices
• Buffer layers of porous silicon for heteroepitaxial film growth of semiconducting compounds on silicon plates
• Construction and production technology of radiation-hardened complementary metal-oxide-semiconductor large-scale integrated circuits of scratchpad memory based on silicon-on-insulator structures
• Construction and production technology of high-temperature-resistant complementary metal-oxide-semiconductor large-scale integrated circuits of scratchpad memory based on silicon-on-insulator structures
• Construction and production technology of circuitries of magneto-sensitive complementary metal-oxide-semiconductor large-scale integrated circuits of scratchpad memory based on silicon-on-insulator structures
• Miniature jet engines for nano-satellities

SERVICES

• Fabrication of porous silicon by electrochemical anodising
• Fabrication of silicon nanowires by metal-stimulated chemical etching
• Chemical and electrochemical deposition of metals, alloys and semiconducting compounds
• Chemical etching of silicon (isotropic and anisotropic)
• High temperature annealing
• Thermocompressive binding of silicon plates

2020 – 2023 PROJECTS

Scientific and technical projects are carried out within the framework of international and national programs, including jointly with partners.

1. Heterostructures based on nanosized crystals of zinc oxide, A3B5 compounds and perovskites doped with transition and rare earth metals for photovoltaics and biosensorics

including, laboratory staff has participated in the following international projects:

• SOROS Award (1993-1994)
• NATO Linkage Research Grant HTECH.LG № 951231 (1995-1996)
• NANO Collaborative Research Grant HTECH.CRG № 950955 (1995-1997)
• Royal Society Joint Project (1996-1998)
• CRDF Award № BE1-108 (1997-1999)
• ESPRIT OLSI Project № 28.934 (2001-2003)
• FP7-INCO BELERA Project (2012-2013)

2. Formation of zinc oxide/nickel oxide nanocomposite thin-film materials for energy storage devices.