CHARGED PARTICLES CURRENT DENSITY MEASUREMENT SENSOR CP-002
Charged particles current density measurement sensor CP-002 is used in industrial equipment for ion-plasma treatment and coating and is designed to control the operational parameters of the ion beams, charged particles fluxes in the industrial processes, as well as for alignment and verification of such characteristics of ion-plasma systems as ion current density distribution.
- ion current density measurement
|Electrode size, cm2||1,0|
|Density of measured current, mА/cm2||up to 10|
|Size, mm||Ø 24x37|
- the electrodes and insulators design makes it possible to use the sensor to measure the current density in the process of ion beam, magnetron and unbalanced magnetron sputtering
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