CHARGED PARTICLES CURRENT DENSITY MEASUREMENT SENSOR CP-002
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PURPOSE
Charged particles current density measurement sensor CP-002 is used in industrial equipment for ion-plasma treatment and coating and is designed to control the operational parameters of the ion beams, charged particles fluxes in the industrial processes, as well as for alignment and verification of such characteristics of ion-plasma systems as ion current density distribution.
APPLICATION AREA
- ion current density measurement
TECHNICAL CHARACTERISTICS
| Electrode size, cm2 | 1,0 |
| Density of measured current, mА/cm2 | up to 10 |
| Size, mm | Ø 24x37 |
ADVANTAGES
- the electrodes and insulators design makes it possible to use the sensor to measure the current density in the process of ion beam, magnetron and unbalanced magnetron sputtering
DEVELOPER
Center 2.1 "Plasma Processing Research Center"
CONTACTS
6, P. Brovki str., 220013, Minsk, Republic of Belarus
☏ +375 17 293 80 79, +375 17 293 88 35
🖷 +375 17 293 88 35
🖂 svad@bsuir.by ; szavad@bsuir.by
🌐 plasma.bsuir.by
OTHER INNOVATIONS IN THIS AREA
PLASMA ELECTRON SOURCE FOR ION BEAM NEUTRALIZATION