CHARGED PARTICLES CURRENT DENSITY MEASUREMENT SENSOR CP-002



 

 

 

 

 

 

PURPOSE

Charged particles current density measurement sensor CP-002 is used in industrial equipment for ion-plasma treatment and coating and is designed to control the operational parameters of the ion beams, charged particles fluxes in the industrial processes, as well as for alignment and verification of such characteristics of ion-plasma systems as ion current density distribution.

 

APPLICATION AREA

  • ion current density measurement

 

TECHNICAL CHARACTERISTICS 

Electrode size, cm                                                                                                    1,0
Density of measured current, mА/cm2                                                                                                                   up to 10
Size, mm Ø 24x37 

 

ADVANTAGES 

  • the electrodes and insulators design makes it possible to use the sensor to measure the current density in the process of ion beam, magnetron and unbalanced magnetron sputtering

 

DEVELOPER

Center 2.1 "Electronic technologies and engineering diagnostics of process media and solid-state structures"

 

CONTACTS

6, P. Brovki str., 220013, Minsk, Republic of Belarus
☏  +375 17 293 80 79, +375 17 293 88 35 
🖷  +375 17 293 88 35
🖂   svad@bsuir.by ; szavad@bsuir.by
🌐  plasma.bsuir.by

 

OTHER INNOVATIONS IN THIS AREA

ION SOURCES

PLASMA ELECTRON SOURCE FOR ION BEAM NEUTRALIZATION

MAGNETRON SPUTTERING SYSTEMS

SYSTEM FOR DIAGNOSTIC PARAMETERS

PROGRAM COMPLEX FOR SIMULATION «DEPOSITION»