FILAMENT-FREE NEUTRALIZER OF ION BEAM NEO-001
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PURPOSE
Filament-free ion beam neutralizer NEO-001 is used as a high-current electron emitter to neutralize a space charge, to compensate ion beams and to support ion-source ionization processes. It is located close to the area of ion generation and acceleration of the ion source.
TECHNICAL CHARACTERISTICS
| Discharge voltage, V | 180...500 |
| Discharge current, А | up to 4,5 |
| Compensated current of the ion beam, А | up to 0,5 |
| Working gas | Ar |
| Gas flow, ml/min | 2,5...15 |
| Working pressure, Pа | 8·10-3...6·10-2 |
ADVANTAGES
- no filament elements
- operational resource is no less than 60 hrs
- insensitive to reactive gas environment
DEVELOPER
Center 2.1 "Plasma Processing Research Center"
CONTACTS
6, P. Brovki str., 220013, Minsk, Republic of Belarus
☏ +375 17 293 80 79, +375 17 293 88 35
🖷 +375 17 293 88 35
🖂 svad@bsuir.by ; szavad@bsuir.by
🌐 plasma.bsuir.by
OTHER INNOVATIONS IN THIS AREA
PLASMA ELECTRON SOURCE FOR ION BEAM NEUTRALIZATION