FILAMENT-FREE NEUTRALIZER OF ION BEAM NEO-001



 

 

 

 

 

 

PURPOSE

Filament-free ion beam neutralizer NEO-001 is used as a high-current electron emitter to neutralize a space charge, to compensate ion beams and to support ion-source ionization processes. It is located close to the area of ion generation and acceleration of the ion source.

 

TECHNICAL CHARACTERISTICS 

Discharge voltage, V                                                                                                                       180...500
Discharge current, А up to 4,5
Compensated current of the ion beam, А up to 0,5
Working gas Ar
Gas flow, ml/min 2,5...15
Working pressure, Pа 8·10-3...6·10-2


ADVANTAGES 

  • no filament elements
  • operational resource is no less than 60 hrs
  • insensitive to reactive gas environment

 

DEVELOPER

Center 2.1 "Electronic technologies and engineering diagnostics of process media and solid-state structures"

 

CONTACTS

6, P. Brovki str., 220013, Minsk, Republic of Belarus
☏  +375 17 293 80 79, +375 17 293 88 35 
🖷  +375 17 293 88 35
🖂   svad@bsuir.by ; szavad@bsuir.by
🌐  plasma.bsuir.by

 

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PLASMA ELECTRON SOURCE FOR ION BEAM NEUTRALIZATION

MAGNETRON SPUTTERING SYSTEMS

SYSTEM FOR DIAGNOSTIC PARAMETERS

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