QUARTZ SENSOR QI-001



 

 

 

 

 

 

PURPOSE

Quartz sensor QI-001 is designed for operation in the systems of quartz thickness control and films growth rate in technological equipment for layers vacuum coating and in the scientific research.

 

APPLICATION AREA

  • electron-beam and thermal evaporation
  • ion-assisted deposition
  • ion-beam sputtering
  • magnetron sputtering (DC, MF, RF), unbalanced magnetron sputtering

 

TECHNICAL CHARACTERISTICS 

Resonators replaceable plates size, mm                                                                                                      Ø 0,55" (14 mm)
Resonators replaceable plates frequency, mm 4.0, 5.0, 6.0
Measured frequency range, MHz 4,0...10
Film thicknesses measurement range, μm 0,1...3,5
Size, mm Ø 46x28


Quartz sensor comes with fittings, flanges, cooling pipes for different operation conditions. 


ADVANTAGES 

  • a magnetic system on Nd-Fe-B permanent magnets is used to protect the sensor from the charged particles flow. Due to that it is possible to use the quartz sensor at ion bombardment of growing film
  • effecient water-cooling of the quartz plate and the magnetic system 
  • it is possible to connect flexible tubes to move the sensor in the chamber in a vacuum process 

 

DEVELOPER

Center 2.1 "Electronic technologies and engineering diagnostics of process media and solid-state structures"

 

CONTACTS

6, P. Brovki str., 220013, Minsk, Republic of Belarus
☏  +375 17 293 80 79, +375 17 293 88 35 
🖷  +375 17 293 88 35
🖂   svad@bsuir.by ; szavad@bsuir.by
🌐  plasma.bsuir.by

 

OTHER INNOVATIONS IN THIS AREA

ION SOURCES

PLASMA ELECTRON SOURCE FOR ION BEAM NEUTRALIZATION

MAGNETRON SPUTTERING SYSTEMS

SYSTEM FOR DIAGNOSTIC PARAMETERS

PROGRAM COMPLEX FOR SIMULATION «DEPOSITION»