QUARTZ SENSOR QI-001
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PURPOSE
Quartz sensor QI-001 is designed for operation in the systems of quartz thickness control and films growth rate in technological equipment for layers vacuum coating and in the scientific research.
APPLICATION AREA
- electron-beam and thermal evaporation
- ion-assisted deposition
- ion-beam sputtering
- magnetron sputtering (DC, MF, RF), unbalanced magnetron sputtering
TECHNICAL CHARACTERISTICS
| Resonators replaceable plates size, mm | Ø 0,55" (14 mm) |
| Resonators replaceable plates frequency, mm | 4.0, 5.0, 6.0 |
| Measured frequency range, MHz | 4,0...10 |
| Film thicknesses measurement range, μm | 0,1...3,5 |
| Size, mm | Ø 46x28 |
Quartz sensor comes with fittings, flanges, cooling pipes for different operation conditions.
ADVANTAGES
- a magnetic system on Nd-Fe-B permanent magnets is used to protect the sensor from the charged particles flow. Due to that it is possible to use the quartz sensor at ion bombardment of growing film
- effecient water-cooling of the quartz plate and the magnetic system
- it is possible to connect flexible tubes to move the sensor in the chamber in a vacuum process
DEVELOPER
Center 2.1 "Plasma Processing Research Center"
CONTACTS
6, P. Brovki str., 220013, Minsk, Republic of Belarus
☏ +375 17 293 80 79, +375 17 293 88 35
🖷 +375 17 293 88 35
🖂 svad@bsuir.by ; szavad@bsuir.by
🌐 plasma.bsuir.by
OTHER INNOVATIONS IN THIS AREA
PLASMA ELECTRON SOURCE FOR ION BEAM NEUTRALIZATION