SYSTEM FOR DIAGNOSTICS OF ION BEAMS AND CHARGED PARTICLE FLUXES PARAMETERS DENI-1500/001
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PURPOSE
System for diagnostics of ion beams and charged particle fluxes parameters DENI-1500/001 is used in industrial equipment of ion-plasma treatment and coating, as well as in the scientific research and is intended for ion beams and charged particles parameters operational control in industrial processes, as well as for alignment and verification of such characteristics of ion-plasma systems as ion energy and ion current density distribution.
APPLICATION AREA
- measurement of the ions and charged particles energy spectrum with energies up to 1500 eV
- measurement of the ion current density
TECHNICAL CHARACTERISTICS
| Range of measured ion energies, eV |
100...300 (4 mА) 10...1500 (4 mА) |
| Types of analyzed particles |
ions of inert gases, N2, |
| Maximum plasma density, sm-3, not more | 1011 |
| Maximum working pressure, Pа (Ar), not more | 0,5 |
| Change time, sec, not more | 20 |
| System weight (net), кg, not more | 6,5 |
Characteristics of six-electrode electrostatic probe ENPR/412-01
| Probe entrance aperture, mm | 6...16 |
| Probe dimensions, mm | Ø 42x51 |
| Probe weight, кg, not more | 0,3 |
Grid electrodes parameters are selected to ensure beams registration at a concentration up to 1011 cm-3. To change the probe sensitivity and to improve spatial resolution, a set of calibrated diaphragms inlets of Ø 6 – 16 mm is used.
DEVELOPER
Center 2.1 "Plasma Processing Research Center"
CONTACTS
6, P. Brovki str., 220013, Minsk, Republic of Belarus
☏ +375 17 293 80 79, +375 17 293 88 35
🖷 +375 17 293 88 35
🖂 svad@bsuir.by ; szavad@bsuir.by
🌐 plasma.bsuir.by
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