SYSTEM FOR DIAGNOSTICS OF ION BEAMS AND CHARGED PARTICLE FLUXES PARAMETERS DENI-1500/001



 

 

 

 

 

 

PURPOSE

System for diagnostics of ion beams and charged particle fluxes parameters DENI-1500/001 is used in industrial equipment of ion-plasma treatment and coating, as well as in the scientific research and is intended for ion beams and charged particles parameters operational control in industrial processes, as well as for alignment and verification of such characteristics of ion-plasma systems as ion energy and ion current density distribution. 

 

APPLICATION AREA

  • measurement of the ions and charged particles energy spectrum with energies up to 1500 eV
  • measurement of the ion current density

 

TECHNICAL CHARACTERISTICS 

Range of measured ion energies, eV                                                                                                      100...300 (4 m)
10...1500 (4 m)
Types of analyzed particles                                                                                                  

ions of inert gases, N2,
gas ions and charged particles fluxes which do not react with the probe materials

Maximum plasma density, sm-3, not more 1011
Maximum working pressure, P (Ar), not more 0,5
Change time, sec, not more 20
System weight (net), g, not more 6,5

 

Characteristics of six-electrode electrostatic probe ENPR/412-01

Probe entrance aperture, mm                                                                 6...16
Probe dimensions, mm Ø 42x51
Probe weight, g, not more 0,3


Grid electrodes parameters are selected to ensure beams registration at a concentration up to 1011 cm-3. To change the probe sensitivity and to improve spatial resolution, a set of calibrated diaphragms inlets of Ø 6 – 16 mm is used. 

 

DEVELOPER

Center 2.1 "Electronic technologies and engineering diagnostics of process media and solid-state structures"

 

CONTACTS

6, P. Brovki str., 220013, Minsk, Republic of Belarus
☏  +375 17 293 80 79, +375 17 293 88 35 
🖷  +375 17 293 88 35
🖂   svad@bsuir.by ; szavad@bsuir.by
🌐  plasma.bsuir.by

 

OTHER INNOVATIONS IN THIS AREA

ION SOURCES

PLASMA ELECTRON SOURCE FOR ION BEAM NEUTRALIZATION

MAGNETRON SPUTTERING SYSTEMS

SYSTEM FOR DIAGNOSTIC PARAMETERS

PROGRAM COMPLEX FOR SIMULATION «DEPOSITION»